The illustration shows a schematic image of the proposed single-axis MEMS capacitive accelerometer. Input acceleration can be sensed by monitoring the capacitance change between the proof mass and ...

Their research (DOI: 10.1038/s41378-024-00826-x), published in Microsystems & Nanoengineering on March 5, 2025, introduces a MEMS accelerometer featuring an advanced anti-spring mechanism.