A typical rotational CMP tool in 2001 featured a throughput of 23 wafers per hour; today that figure is around 28, according to Novellus. Tool availability has only improved from 65 percent to 75 ...

San Jose, Calif. – June 23, 2009- To address the challenges of wafer polishing at future technology nodes, Peter Wolters GmbH, a wholly-owned subsidiary of Novellus Systems (NASDAQ:NVLS), has recently ...

The newly merged enterprise will maintain the Lam Research brand and will continue to produce etch and single-wafer cleaning equipment, while expanding its offering to include Novellus System ...

SAN JOSE, US: Novellus Systems announced two new industry ... Enhanced source technology combined with faster wafer heating for higher ash rates enables the system to simultaneously deliver ...