Contemporary chipmaking tools perform overlay operations primarily using advanced optical metrology, alignment marks, and closed-loop control systems integrated into photolithography systems.

Photolithography at a wavelength of 193 nm ... To be successful the alignment of the two mask exposures is critical, and as twice as many mask exposures are required, throughput is approximately ...

This pattern can then guide further processes, such as etching or doping, to create the final microstructures. Photolithography offers high precision, repeatability, and the ability to fabricate ...

Extreme ultraviolet (EUV) lithography is the next step in this trend. It uses radiation of wavelength 13.5 nm, thereby offering significant potential to extend the resolution of photolithography ...

As an inexpensive photolithography solution the MJB3 has set industry standards specifically for processing of small substrates and pieces up to 100mm. Equipped with a reliable, high precision ...