The process starts with the substrate being coated with a light ... to create the final microstructures. Photolithography offers high precision, repeatability, and the ability to fabricate complex ...

Unlike photolithography and electron beam lithography, which utilize light or electron beams to modify the resist's properties, nanoimprint lithography mechanically deforms the resist using a stamp or ...

Deep ultraviolet (DUV) lasers, known for their high photon energy and short wavelengths, are essential in various fields such ...

Photolithography, a vital stage in the manufacture of microelectronics, is in principle a simple process. An image of a mask containing the structure of an integrated circuit (IC) is projected ...

The Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from ...

also known as the more traditional mask photolithography. In the end, this works out well for him, reaching just about 2 µm effective minimum feature size in this two-step process. We haven’t ...

Photolithography uses light to transfer a ... However, double patterning increases the number of steps needed to process each wafer, and design rules may also have to be restricted to allow ...