The process starts with the substrate being coated with a light ... to create the final microstructures. Photolithography offers high precision, repeatability, and the ability to fabricate complex ...

Unlike photolithography and electron beam lithography, which utilize light or electron beams to modify the resist's properties, nanoimprint lithography mechanically deforms the resist using a stamp or ...

This corporation, the first in the domestic equipment industry to surpass sales of 3 trillion won, has developed spinner equipment for the photolithography process, one of the three core processes ...