In their most general form, MEMS consist of four elements: mechanical microstructures, microsensors, micro-actuators and micro ... of other material properties like optical, mechanical, thermal, ...

MEMS Labs, Inc. has announced the extension of its µCooling fan-on-a-chip technology into AI data centers, providing an ...

By combining MEMS design, pulsed thermal modulation, and machine learning, the researchers have created a compact gas sensor ...

Thermal nanoactuators rely on the expansion or ... They are integrated into microsensors, microvalves, micropumps, and other MEMS components to enable precise control and movement at the microscale.