Process flow of thermal nanoimprint lithography: schematic of (a) a mold is pressed onto a thin layer of polymer on a substrate heated to a temperature above the polymer's glass transition temperature ...

18,19 Figure 2. Schematic overview of nanoimprint lithography. Image Credit: Merck The rigid master is typically prepared via e-beam lithography and has feature sizes in the 10–100 nm size range. Once ...

Upper row: schematic process flow, scanning electron microscope (SEM) images of resulting patterns. (Image: Fraunhofer Society) Block copolymer lithography has been explored for the fabrication of ...

One of the most complex parts of this process is lithography: the step in which shapes are drawn onto a silicon wafer. There are several ways to do this, all of them rather complicated ...

Digital lithography technology (DLT) is promising chipmakers to combine chips with submicron wiring on glass and other large substrates. And this maskless technology is at the center of a strategic ...

Learn More In a milestone for the global semiconductor industry, Multibeam Corp. today introduced the MB platform, a first-of-a-kind Multicolumn E-Beam Lithography (MEBL) to make chip factories ...

One less prominent but highly crucial supply chain input is the lithography equipment used for chip manufacturing. Lithography – the process of printing integrated circuit patterns onto silicon ...