San Jose, Calif. – June 23, 2009- To address the challenges of wafer polishing at future technology nodes, Peter Wolters GmbH, a wholly-owned subsidiary of Novellus Systems (NASDAQ:NVLS), has recently ...

2011 /PRNewswire/ -- Novellus Systems announced today that its subsidiary Peter Wolters GmbH has introduced a new version of its microLine double side lapping system for prime silicon wafers.

A typical rotational CMP tool in 2001 featured a throughput of 23 wafers per hour; today that figure is around 28, according to Novellus. Tool availability has only improved from 65 percent to 75 ...

Yet now, even as equipment-makers like Novellus wait for their revenues to surpass their pre-crash levels, some segments of the ever-restless electronics industry want to boost the wafer size ...

Novellus Systems has introduced what it claims is industry ... a necessity when integrating with new materials such as nickel silicide. Wafers with a previously deposited plasma-enhanced chemical ...

The newly merged enterprise will maintain the Lam Research brand and will continue to produce etch and single-wafer cleaning equipment, while expanding its offering to include Novellus System ...