Abstract: In the photolithography process of integrated circuit (IC) manufacturing, overlay (OL) control is a key factor for successful exposure. Overlay control is achieved by creating models that ...

†Department of Materials Science and Engineering, University of Illinois. ‡Department of Mechanical Science and Engineering, University of Illinois. §Sandia National Laboratories. ∥Department of ...

Abstract: Photolithography, typically taking about one- third of the total wafer manufacturing costs, is one of the most complex operations and is the most critical process in semiconductor ...