EUV lithography based on this design can work with smaller EUV light sources, reducing costs and dramatically improving reliability and lifetime of the machines. It also consumes less than one-tenth ...

Figure 2. Schematic overview of nanoimprint lithography. Image Credit: Merck The rigid master is typically prepared via e-beam lithography and has feature sizes in the 10–100 nm size range. Once ...

Why it matters: Canon has shipped the first example of its nanoimprint lithography equipment to an American research consortium, marking a significant milestone in the commercialization of this ...

EUV lithography is set to become a cornerstone of semiconductor technology, driving the continued miniaturization of devices by leveraging its exceptionally short-wavelength light. 8 Recent ...

A new publication from Opto-Electronic Sciences; DOI 10.29026/oes.2024.230035, discusses supercritical metalens for photolithography. Lithography is an important part of micro-nano processing.

Electron beam lithography (EBL) is a technique for creating high-resolution patterns on a semiconductor substrate by directing a beam of electrons to selectively modify a thin layer of electron ...

Lithography in semiconductors is like a high-precision light-based printing process for creating miniaturised circuit patterns on silicon wafers. Here’s a deeper look at how it works: ...

Imec has unveiled a new climate-friendly way to produce patterns on chips using lithography and etch for advanced chip factories. Leuven, Belgium-based Imec said the tech can reduce the carbon ...

Lithography uses a kind of template, called a photomask—or just mask—for creating patterns on semiconductor wafers. The industry is always looking for methods that improve resolution and ...

Canon expects its nanoimprint lithography machine to ship this year, competing with ASML's EVU gear as economies around the world are keen to expand their chip production capacity on their home turfs, ...

Digital lithography technology (DLT) is promising chipmakers to combine chips with submicron wiring on glass and other large substrates. And this maskless technology is at the center of a strategic ...