Based on the VECTOR Express tools released in March, Novellus said VECTOR Extreme helps chipmakers reduce average process cycle times by more than 40 percent as compared to other systems available, ...

A typical rotational CMP tool in 2001 featured a throughput of 23 wafers per hour; today that figure is around 28, according to Novellus. Tool availability has only improved from 65 percent to 75 ...

2011 /PRNewswire/ -- Novellus Systems announced today that its subsidiary Peter Wolters GmbH has introduced a new version of its microLine double side lapping system for prime silicon wafers.

Yet now, even as equipment-makers like Novellus wait for their revenues to surpass their pre-crash levels, some segments of the ever-restless electronics industry want to boost the wafer size ...

Novellus Systems has introduced what it claims is industry ... a necessity when integrating with new materials such as nickel silicide. Wafers with a previously deposited plasma-enhanced chemical ...