In their most general form, MEMS consist of four elements: mechanical microstructures, microsensors, micro-actuators and micro ... of other material properties like optical, mechanical, thermal, ...

By combining MEMS design, pulsed thermal modulation, and machine learning, the researchers have created a compact gas sensor that delivers high performance without the need for arrays or extensive ...

Thermal nanoactuators rely on the expansion or ... They are integrated into microsensors, microvalves, micropumps, and other MEMS components to enable precise control and movement at the microscale.